AJA International Sputter

Capabilities

• Materials: Dielectrics (SiOx, SiNx, AlOx), semiconductors (Si), metal oxides (TCOs: ITO, IZO, AZO), non-conducting materials (B), etc.
• Sample size: 6 in wafers, 4 in wafers, pieces.
• Power: 3 RF sources
• Number of gun: 4 guns
• Heating: unavailable
• Control: Software PhaseJ-II, Manual