Varian Evaporator
Description
- This system is a cryo-pumped thermal evaporator with base pressures in the 10-6 Torr range.
- Typical source materials are melted by resistive heating in up to three metal evaporation boats or ceramic crucibles.
- Evaporation rates are manually controlled by varying the output power of a DC power supply, allowing for currents up to 200 amps.
Capabilities
- Material: Metals (Ag, Al, Cr, Pd, etc.)
- Number of boat: 3 thermal boats
- Suitable for thick metal deposition.
- The sample holder is fixed.
Contact Email
marco.ernst@anu.edu.au